WebThe CESCOR has been designed for the compensation of spherical aberration (Cs) in scanning-transmission electron microscopy (STEM). It is a hexapole-corrector with two multipole stages and it compensates all … WebThis Cs-corrector permits a high flux in the electron probe. This leads to a 10x higher probe current and at the same time to a 2x smaller probe diameter on the sample as for a non-Cs-corrected STEM microscope. …
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